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1 electron-beam pattern
1) конфігурація електронного променя2) структура, сформована електронним променемEnglish-Ukrainian dictionary of microelectronics > electron-beam pattern
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2 electron-beam pattern writer
електронно-променева установка для формування малюнкаEnglish-Ukrainian dictionary of microelectronics > electron-beam pattern writer
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3 pattern
1. ім.1) малюнок; зображення; образ; рельєф2) конфігурація, форма2. дієсл. формувати малюнок; формувати зображення; формувати рельєф; структурувати - chip pattern
- circuit pattern
- computer-generated pattern
- conductive pattern
- conductor pattern
- contact pattern
- contiguous-disk propagation pattern
- customized metallization pattern
- discretionary wiring pattern
- dislocation pattern
- domain pattern
- dopant pattern
- electron-beam pattern
- electron diffraction pattern
- emitter pattern
- error-free layout pattern
- etchedpattern
- etchpattern
- fine-line pattern
- fine-linewidth pattern
- fixed-interconnection pattern
- gate pattern
- geometric pattern
- growth pattern
- high-aspect ratio pattern
- insulation pattern
- integrated-circuit pattern
- interconnection mask pattern
- layout pattern
- lead pattern
- mask pattern
- masked реrmalloy pattern
- masking pattern
- master pattern
- measurement pattern
- metal-finger pattern
- multiple pattern
- optical pattern
- oxide pattern
- permalloy propagation pattern
- photographic emulsion-maskpattern
- photographic emulsionpattern
- photoresist film pattern
- photoresist pattern
- photoresist mask pattern
- process evaluation and control pattern
- programmed-interconnection pattern
- regular pattern
- repetitive pattern
- reticle pattern
- routing pattern
- shifting test pattern
- silicon pattern
- step coverage pattern
- striation pattern
- subisolation pattern
- sunken охide pattern
- surface relief pattern
- test pattern
- thick-film pattern
- thin-film pattern
- transistor pattern
- wafer pattern
- wiring pattern -
4 writer
установка для (послідовного крокового) формування малюнка - pattern writer -
5 generator
1) генератор 2) вимірювальний перетворювач, датчик 3) генератор [програма синтезу] тестів - automated test generator
- built-in test generator
- character generator
- electron-beam mask generator
- function generator
- gate test generator
- Hall generator
- macroblock test generator
- mask pattern generator
- mask generator
- memory test pattern generator
- memory pattern generator
- molecular-beam generator
- multilevel-interconnection generator
- optical pattern generator
- pattern generator
- primary pattern generator
- speech generator
- test generator
- test-data generator
- ultrasonic generator
- verification condition generatorEnglish-Ukrainian dictionary of microelectronics > generator
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6 mask
1. ім.1) фотошаблон; шаблон; (вільна) маска; трафарет2) маска, маскуючий шар2. дієсл. маскувати - artwork mask
- base-region mask
- base mask
- base-resistor mask
- bimetal mask
- blocking mask
- chrome mask
- collector mask
- composite mask
- contact-area mask
- contact mask
- contact-print additional mask
- custom mask
- deep UV mask
- delineation mask
- deposition mask
- diffusion mask
- doping mask
- dry film solder mask
- E-beam mask
- E-chrome mask
- electron-beam generated mask
- emitter mask
- emulsion mask
- etch ing mask
- etch mask
- etch-resistantmask
- etch-resistmask
- evaporation mask
- exposure mask
- fault injection mask
- faultless mask
- field-oxidemask
- fieldmask
- fine-line mask
- gold mask
- grid mask
- hard-surface mask
- high-contrast X-ray mask
- high-flatness mask
- high-transmission X-ray mask
- IC mask
- in situ mask
- insulator mask
- interconnection mask
- ion-beam stencil mask
- ion-implantation mask
- iron-oxide mask
- isolation mask
- layered mask
- lithographic mask
- master mask
- metal mask
- metal etched mask
- metallization etching mask
- metal-on-glass mask
- metal-on-polymer mask
- moving mask
- multi-pinhole mask
- native охide mask
- negative mask
- nonerodible mask
- offset mask
- optical mask
- optical gate mask
- overlaid mask
- oxidation mask
- oxygen-impermeable mask
- pattern mask
- pattern transfer mask
- photolithographic mask
- photoresist mask
- plating mask
- production mask
- programmingmask
- programmask
- projection mask
- p-well mask
- quartz mask
- refractory mask
- resistor-body mask
- reticle mask
- self-aligned mask
- sputter mask
- stencil mask
- step-and-repeat mask
- thick-film screen mask
- thin-film mask
- trench mask
- vacuum-deposition mask
- work mask
- X-ray lithography mask
- X-ray mask
- 1x mask
- 1:1 mask -
7 generation
1) генерація 2) утворення; виготовлення; формування 3) покоління (напр. приладів) 4) генерація [синтез] тестів - automated test pattern generation
- automatic stimulus generation
- avalanche generation
- bubble generation
- carrier generation
- carrier pair generation
- color-pattern generation
- dislocation generation
- E-beam pattern generation
- electron-hole pair generation
- layout generation
- manual test generation
- mask generation
- module generation
- multiple-image generation
- non-particulate generation
- participate generation
- pattern generation
- radiation-enhanced generation
- static charge generation
- static generation
- test generation
- test-pattern generation
- thermal carrier generationEnglish-Ukrainian dictionary of microelectronics > generation
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8 etching
травлення (див. т-ж etch) - anisotropic etching
- anode etching
- batch etching
- blanket etching
- chemically assisted etching
- concentration dependent etching
- crystallographically sensitive etching
- deep reactive ion etching DRIE
- deep reactive ion etching
- differential etching
- digital etching
- diode ion etching
- diode etching
- dip etching
- directional etching
- dislocation etching
- dry process etching
- dry etching
- electron-beam induced etching
- excessive etching
- exciraer laser etching
- gas-phase plasma-assisted etching
- high-frequency ion etching
- hydrogen reactive ion etching
- ion etching
- ion-assisted plasma etching
- ion-beam induced etching
- isotropic etching
- jet etching
- laser-enhanced etching
- laser-induced pattern projection etching
- laser radical etching
- lateral etching
- lift-off etching
- light-induced etching
- low-pressure plasma etching
- low-pressure etching
- masked etching
- maskless etching
- maskless laser etching
- mesa etching
- microwave plasma etching
- microwave etching
- mild etching
- nonundercutting etching
- orientation-dependent etching
- oxygen gas plasma etching
- permeation etching
- photochemical etching
- photoelectrochemical etching
- photo-enhanced chemical dry etching
- photoexcited etching
- photo-initiated etching
- photoresist-masked etching
- plasma reactor etching
- plasma etching
- post etching
- preferential etching
- radical plasma etching
- radical etching
- radio-frequency plasma etching
- reactive ion etching
- regenerative etching
- resistless etching
- selective etching
- sharp etching
- sideways etching
- single-step laser etching
- spray etching
- sputter etching
- steady-state etching
- synchrotron radiation-assisted etching
- taper etching
- tetrode ion etching
- tetrode etching
- triode ion etching
- triode etching
- undercuttingetching
- undercutetching
- UV laser etching
- vacuum ultraviolet-assisted etching
- vertical etching
- VUV-assisted etching
- wet chemical etching
- wet etching
- zero-undercut etching -
9 exposure
1) експонування 2) розкриття, оголення (напр. шару під маскою) - contact exposure
- deep-UV exposure
- die-by-die pattern exposure
- direct wafer exposure
- direct-writing exposure
- electron-beam exposure
- flood exposure
- full-field [full-wafer] exposure
- ion exposure
- laser exposure
- light optical exposure
- light exposure
- mask exposure
- multiple exposure
- pattern exposure
- postdevclopment exposure
- projection exposure
- proton exposure
- proximity exposure
- SOR exposure
- step-and-repeat exposure
- synchrotron exposure
- ultraviolet exposure
- X-ray exposure -
10 fabrication
виготовлення; виробництво - batch fabrication
- continuous-суcle fabrication
- electron-beam fabrication
- fine-pattern fabrication
- flexible fabrication
- high throughput fabrication
- high-volume fabrication
- in-house fabrication
- ion-implantation fabrication
- large-batch fabrication
- large-scale fabrication
- laser fabrication
- low-volume fabrication
- nanoscale fabrication
- nanostructure fabrication
- photolithographic circuit fabrication
- volume fabrication
- X-ray fabricationEnglish-Ukrainian dictionary of microelectronics > fabrication
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11 metallization
(сполучна) металізація - Al/Si metallization
- barrier metallization
- bridging metallization
- Cr-Cu-Au metallization
- electron-beam metallization
- fine-line metallization
- fixed-pattern metallization
- gate metallization
- interlayer metallization
- interlevel metallization
- lift-off metallization
- multilayer metallization
- ohmic metallization
- planar metallization
- recessed metallization
- silver-palladium metallization
- thick-film metallization
- thin-film metallization
- VLSI metallizationEnglish-Ukrainian dictionary of microelectronics > metallization
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12 repeater
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